Produkt mají v nabídce:
Micro and Nano Fabrication - Gatzen, Hans H. a Saile, Volker a Leuthold, Jurg
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
