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Digital Holography for MEMS and Microsystem Metrology - Asundi, Anand (Nanyang Technological University, Singapore)

By taking a practical approach to the industrial inspection of digital holography, Digital Holography for MEMS and Microsystem Metrology offers a description of the use of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation and device testing and inspection.

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